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| 橢圓儀 |
專利PEM式光學設計 |
Wafer鍍膜Mapping量測 |
| 產品規格 |
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| Sample |
Set horizontally
Reflectance mode |
| Operation principle |
50 kHz Quartz PEM (Photo Elastic Modulator)
with optical servo and optical reference
U.S.Patent 5,298,973 |
| Wavelength range |
350 nm ~ 800 nm in 1 nm steps |
| Incidence angle |
45°~ 90° in 0.01° steps |
| Repeatability |
∆ , y better than ± 0.01° |
| Spectral band width |
1 nm |
| Light source |
Xe lamp and LD 650 nm r |
| Detector |
Photomultiplier |
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| 產品特色 |
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| 以專利PEM振盪式圓偏極化晶體，產生50kHz的高頻圓偏光，有別於一般Rotation Analyzer Ellipsometer，具有下列特色： |
| ■ Faster measurement speed：最快量測速度1 msec，可用於LCD的高速應答測定
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■ Higher measurement stability：獨特JASCO OPTICAL SERVO回饋機置，可自動補償環境變
化(如溫度)所產生的偏差
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| ■ Very sensitive to ultra-thin films：可量測膜厚範圍 1 Å ~ 105 Å
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M-550